Chemical Filters
In the past the cleanroom technology was mainly focused on the reduction of airborne particulate contamination. With decreasing feature sizes and increasing complexity in semiconductor manufacturing airborne molecular contamination has become a major issue in contamination control. Typical sources for airborne molecular contamination (AMC) are of natural origin or from processes such as outgassing of materials or chemical compounds from open process applications. AMC is divided up into four categories: Acids, bases, condensables and dopants.
As a specialist with many years of experience in the field of cleanroom technology for semiconductor manufacturing we have developed our own line of chemical filters for AMC control. In our laboratories equipped with state of the art chemical analysis technology we identify the AMC problems of our customers. Based on the measurements and substances identified we offer a customized chemical filtration solution allowing significantly reduced cost of ownership from investment through operation and waste disposal, providing most efficient protection of sensitive manufacturing processes from airborne molecular contamination. Our product line includes pleated filters and bag filters for the application in filter fan units and air handling units.
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