AMC / Ionisation

Analysis

• Analysis of cleanroom and makeup air contamination with sampling and online measurements
• Determination of contamination sources
• Contamination assessment for customers
• Outgassing analysis of materials

Troubleshooting

• Elimination of production malfunction
• Optimisation of process equipment and minienvironments

Concept development

• Elimination of contamination sources
• Check of the use of ionisers: process areas, minienvironments, number of ionisers
• Check of the use of filters
• Technical and financial assessment ( cost of ownership)
• Design of monitoring concepts

Removal measuring for molecular contamination and ionisation

• Cleanrooms "as-built"
• Minienvironments "as-built"

Tests and measurements

• Chemical filter test stands (indoor)
• Mobile analysers

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