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Chemical Processes
Ultra trace analysis
- Analysis of contamination in ultra pure water
- Leachout tests with components of ultra pure water plants
- Analysis of the cleanroom and make up air contamination
- Outgassing analysis of materials
Exhaust air treatment of semiconductor factories
- Local pre-cleaning of toxic exhaust air
- Design of exhaust air plants including the choice of material
Environmental technology for industrial applications
- Biotrickling filters for separation of Volatile Organic Carbon (VOC) and elimination of smelling products including pilot test (1000 m3/h)
- Regenerating charcoal filters for elimination of VOC and smell
- Ion exchange filters for separation of acid and basic gases
- Adsorptive and chemisorptive charcoal filters
- Mass balancing
- Emission prediction for semiconductor industries
Analyses methods used
- Ion Chromatography (IC) with lowest detection limits in the ppt and sub-ppt level
- Total Organic Carbon (TOC) in water
- Flame Ionic Detection (mobile) for exhaust and cleanroom air (FID)
- Mobile Gas Chromatography (GC)
- Inductive-Coupled-Plasma-Mass-Spectroscopy (ICP - ZS)
- (Stationary) Gas Chromatography-Mass-Spectroscopy (GC - MS)
- Mobile trace ionic analysis with spectroscopic procedure for NH3, SO2, H2S, NO2, O3 in air
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Local abatement flow scheme
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