Scope of Services

Analysis

• Measurement of Airborne Molecular Contamination (AMC)
• Outgassing measurements of materials (hydrocarbons, organic chemicals) using GC-FID, GC-MS
• Measurement of ionic contaminants in DI water and process chemicals using IC and ICP-MS
• Evaluation of chemisorptive and adsorptive filtermedia (efficiency, lifetime, pressure drop)
• Energy consumption measurements of facilities and components
• Analysis of particle sources
• Microbiological examinations in air, water and on surfaces
• Particle measurements in gases and fluids
• CFD-airflow simulation (airflow velocity, temperature profile and contamination concentration profile)
• Airflow visualization

Conceptual design and system evaluation

• Return air systems
• Make up air supply
• Exhaust treatment using central systems and local abatement
• Mass balancing
• Emission predicition for semiconductor industries
• Air ionization inside the cleanroom
• Reduction of airborne molecular contamination (AMC)
• Energy supply concepts (cogeneration and conventional systems)

Product- and system development

• Adsorptive and chemisorptive filters for make up air and exhaust treatment
• High precision environmental chambers used for equipment in the microelectronic industry
• Cleanroom components
• Software for control, monitoring and visualization of sensors and actors in the cleanroom technology
• Central and local recirculation air systems for clean air supply
• Units for process exhaust treatment

Qualification and certification

• Certification of cleanrooms and process air supply systems
• Regular inspection and requalification of cleanrooms and clean workbenches
• Qualification of cleanroom components according VDI 2083/ 8
• Certification of HEPA and ULPA filters
• Certification and qualification of DI water systems (ions, organic components, particles, TOC, silicate, ...)
• Qualification of ionexchanger raisins, tube materials and other DI water system components in regard to outleaching behavior

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